Phase-Shifting interference microscope with extendable field of measurement
碩士 === 國立臺北科技大學 === 光電工程系研究所 === 105 === This research proposes an innovative phase-shifting interference microscope available for profiling micro-structure contours. It is composes of a light source module, phase modulation module, and interferometric module; it achieves the inspections using five-...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ekat23 |