Analysis of Specific Resistance of Vanadium and Vanadium Oxide
碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 105 === In this study, the Specific Resistance analysis of amorphous vanadium oxide, vanadium oxide film were prepared by DC magnetron sputtering on silicon, prepare temperature at 300℃ to 400℃,film thickness at 100 to 200nm, Using different methods of analysi...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/j9rh23 |