Enhanced Performance of LiPON by Plasma Treatments for Solid Electrolyte Applications
碩士 === 國立高雄大學 === 化學工程及材料工程學系碩士班 === 105 === In this work, LiPON thin films were deposited on Cu foil by rf magnetron sputtering from an Li3PO4 target in a pure N2 atmosphere. We fixed all parameters except N2 flow rate from 15sccm~40sccm. We modified the thin films by H2, Ar mix H2 plasma. X-ray...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/2byz6k |