Freeform Source Optimization with Metaheuristic Binary Ant Colony and Neural Network Algorithms to Enhance Lithographic Imaging Performance
博士 === 國立臺灣科技大學 === 自動化及控制研究所 === 105 === Source optimization (SO) is one of the important RET used to overcome the distortion occur in lithography as the complexity of the mask pattern increases. In this study, a pixelated SO is employed for improving the process window of lithography process while...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rp3zth |