Design and Development of Tip-scanning Atomic ForceMicroscope based on an Astigmatic Detection System
碩士 === 國立臺灣大學 === 機械工程學研究所 === 105 === Astigmatic atomic force microscope takes advantages of compact size and high bandwidth. Until now, only sample-scanning configuration, which takes more time to prepare sample in order to avoid changing scanning range, exists. This thesis proposes a tip-scanning...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qjgywx |
| Summary: | 碩士 === 國立臺灣大學 === 機械工程學研究所 === 105 === Astigmatic atomic force microscope takes advantages of compact size and high bandwidth. Until now, only sample-scanning configuration, which takes more time to prepare sample in order to avoid changing scanning range, exists. This thesis proposes a tip-scanning method suitable for astigmatic atomic force microscope, and the detection system based on the method is also constructed. Errors of this method are estimated by optical simulation software. Finite element simulation software is also used for designing the scanner and holder. The astigmatic detection system is calibrated by commercial piezo stage and laser displacement sensor. The performances of homemade scanner are tested by astigmatic pickup head and laser displacement sensor. The dimensions of the homemade scanner are 63 mm in length, 59 mm in width and 5 mm in height. The maximum actuation stroke of fast axis is 5 µm and its resonant frequency is 4.5 kHz. The maximum actuation stroke of slow axis is 4 µm and its resonant frequency is 3.06 kHz. The feasibility of system is verified by scanning standard sample. The result indicates that the system can measure up to 20 nm in height and feasible measurement range is at least 98 μm × 98 μm.
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