Comprehensive Analysis of Interfacial Micro Dome Structure in Triboelectric Energy Harvester
碩士 === 國立臺灣大學 === 機械工程學研究所 === 105 === In this thesis, we made the silicon substrate with the trench pyramid array on the surface by the ways of photolithography, dry etching, and wet etching. After the replica-modeling process, pyramid array structures could be formed on the interfacial layer of PD...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/r4ch2j |