Fabrication of Thick Film Piezoelectric Micro Energy Harvester based on PMN-PT and Process Optimization

碩士 === 國立臺灣大學 === 工程科學及海洋工程學研究所 === 105 === In the past studies, the vibration energy harvesting technologies have been studied intensively and based on material of lead zirconate titanate (PZT). The power outputs of piezoelectric MEMS generators were steadily improved year by year. Until now, the p...

Full description

Bibliographic Details
Main Authors: Shih-Chao Lin, 林士超
Other Authors: 吳文中
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/44878824238848792264