Characterization, formation mechanism, and application of copper-based line structures grown on silicon
碩士 === 國立臺灣大學 === 化學研究所 === 105 === In recent years, a novel and facile method was developed in our lab to fabricate ultramicroelectrode arrays on the silicon chip. When annealing in specific temperature and oxygen environment, the originally intact copper film on the thin silica-covered silicon chi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8e2vma |