Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy

Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy

碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 105 === abstract hide

Bibliographic Details
Main Authors: Hanug, Kaung-Ting, 黃冠庭
Other Authors: Yeh, J. Andrew
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/2y9mzy
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spelling ndltd-TW-105NTHU57950222019-05-16T00:00:22Z http://ndltd.ncl.edu.tw/handle/2y9mzy Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy 高強度屏蔽奈米化矽基板之應力控制以抑制氮化鎵磊晶後基板翹曲 Hanug, Kaung-Ting 黃冠庭 碩士 國立清華大學 奈米工程與微系統研究所 105 abstract hide Yeh, J. Andrew 葉哲良 2017 學位論文 ; thesis 80 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 105 === abstract hide
author2 Yeh, J. Andrew
author_facet Yeh, J. Andrew
Hanug, Kaung-Ting
黃冠庭
author Hanug, Kaung-Ting
黃冠庭
spellingShingle Hanug, Kaung-Ting
黃冠庭
Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy
author_sort Hanug, Kaung-Ting
title Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy
title_short Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy
title_full Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy
title_fullStr Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy
title_full_unstemmed Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy
title_sort stress control of high strength sealed nanotextured silicon wafer to resist warpage after gan epitaxy
publishDate 2017
url http://ndltd.ncl.edu.tw/handle/2y9mzy
work_keys_str_mv AT hanugkaungting stresscontrolofhighstrengthsealednanotexturedsiliconwafertoresistwarpageafterganepitaxy
AT huángguāntíng stresscontrolofhighstrengthsealednanotexturedsiliconwafertoresistwarpageafterganepitaxy
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AT huángguāntíng gāoqiángdùpíngbìnàimǐhuàxìjībǎnzhīyīnglìkòngzhìyǐyìzhìdànhuàjiālěijīnghòujībǎnqiàoqū
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