Stress control of high strength sealed nanotextured silicon wafer to resist warpage after GaN epitaxy
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 105 === abstract hide
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/2y9mzy |