Selective Area Growth of GaN Nanowire Array Embedded with Ga(In)N Quantum Boxes on Si(111) Substrates Using Molecular Beam Epitaxy

博士 === 國立清華大學 === 電子工程研究所 === 105 === In this study, the selective area growth (SAG) of high-density (2.5×109 cm-2) GaN nanowires (NWs) embedded with Ga(In)N quantum boxes (QBs) on Si(111) substrate by plasma-assisted molecular beam epitaxy are demonstrated. At first, substrates with various masking...

Full description

Bibliographic Details
Main Authors: Wu, Chun Hung, 吳濬宏
Other Authors: Cheng, Keh Yung
Format: Others
Language:en_US
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/4jkdvv