Development of A Low Quadrature Error, Acceleration-Insensitive MEMS Vibratory Gyroscope using The Fully-Decoupled Tuning Fork (FDTF) Structural Design
博士 === 國立清華大學 === 動力機械工程學系 === 105 === This thesis presents the structural design of a single-axis MEMS vibratory gyroscope, which combines the fully-decoupled mechanism with the tuning fork architecture (a FDTF gyro), to enhance the gyroscope performances. The fully-decoupled mechanism is realized...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/yq24fq |