Fabrication of Nano-Templates for Observing Self-Assembly of Block Copolymers in Confined Structures
碩士 === 國立清華大學 === 光電工程研究所 === 105 === In this study, we combine the “top-down” lithography process and “bottom-up” self-assembly of block copolymer approach to generate nano-structure with well-oriented periodic arrays over large area. The first nano-template is a periodic Si grating made by dry etc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/pg66xj |