Predictive Maintenance Model For Drilling Process of Semiconductor Probe Cards And An Empirical Research for Advanced Process Control
碩士 === 國立清華大學 === 工業工程與工程管理學系所 === 105 === Semiconductor industry develops a series of technology roadmap, for example, International Technology Roadmap for Semiconductors(ITRS) to address rapid changes driven by Moore’s Law. Yield is a factor of keeping competition for the capital-intensive semicon...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
|
Online Access: | http://ndltd.ncl.edu.tw/handle/6k57c9 |