Phase shifting interferometry with a spatial light modulator for thin film measurements
碩士 === 國立中央大學 === 照明與顯示科技研究所 === 105 === This article aims to set up a phase shifting interferometry(PSI) based on polarized Twyman-Green interferometry and applies spatial light modulator(SLM) as a phase-shifting manner. In research, we made a series of test to obtain relationship between phase shi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29478863744224261473 |