none
碩士 === 國立中央大學 === 機械工程學系 === 105 === In this study, ultra-thin hydrogenated amorphous silicon passivation layer (< 10 nm)was prepared on silicon substrate by using silane (SiH4), hydrogen (H2) and argon (Ar) to apply silicon heterojunction (SHJ) solar cells. The chamber of PECVD processing enviro...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/2xt46m |