Benefit Analysis Of Waste Sulfuric Acid Collection System -an Example of Semiconductor FAB
碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 105 === The purpose of this paper is to study the recycling and reuse of sulfuric acid in the semiconductor industry. The chemical through the wet etching process will be discharged through the piping line, the waste feature contains acid , alkaline and organic che...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3z2863 |