Characteristics of multifunctional AZO films on the Si substrate with nanostructure prepared by atomic layer deposition
碩士 === 國立交通大學 === 材料科學與工程學系所 === 105 === In this study, multifunctional AZO thin films were grown on Si(100) substrate by atomic layer deposition (ALD) system. The experiments contain four parts: At first, high quality ZnO and Al-doped ZnO (AZO) thin film was successfully deposited on Si(100) subs...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/345xbh |