Study of JL and IM Gate-All-Around Poly-Si Nanowire TFTs as SONOS Memory device

碩士 === 國立交通大學 === 材料科學與工程學系奈米科技碩博士班 === 105 === Recently, the dimension of device and gate length scaling continuously along with Moore’s Law result to short channel effect (SCE) including drain-induced barrier lowering (DIBL) and gate-induced drain leakage (GIDL) since the gate couldn’t control the...

Full description

Bibliographic Details
Main Authors: Chang, Yuan-Hao, 張遠豪
Other Authors: Sheu, Jeng-Tzong
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/2a9gyk