Growth of thick GaN film with low dislocation density on Si(111) substrate by inserting LT-AlGaN interlayer and HP-GaN nucleation layer

碩士 === 國立交通大學 === 光電系統研究所 === 105 === GaN shows many superior physical properties such as wide bandgap, high carrier velocity, high breakdown field and good thermal conductivity. Therefore, normal AlGaN/GaN HEMTs show characteristics of high breakdown voltage and high current. Furthermore, normal Al...

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Bibliographic Details
Main Authors: Huang, Kun-Sung, 黃坤松
Other Authors: Chang, Edward Yi
Format: Others
Language:en_US
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/eg83gx