The Studies of Antireflective Silicon Substrate Fabricated by Electrode-less Etching
碩士 === 國立暨南國際大學 === 光電科技碩士學位學程在職專班 === 105 === The Porous silicon structure has many high-quality special properties, widely used in semiconductor, energy and sensors and other fields, porous silicon structure development process technology plays a key role. This study is to explore a simple and rap...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/68586093523712851135 |