Effect of Flow Rate of Sputtering Gas on Mechanical and Tribological Properties of Hydrogenous Carbon Nitride(a-CNx:H) Prepared by DC Magnetron Sputtering
碩士 === 國立成功大學 === 機械工程學系 === 105 === This study discusses the mechanical and tribological properties of hydrogenous carbon nitride coatings deposited by unbalanced DC magnetron sputtering using nitrogen-argon mixture gas and graphite as the source. In this experiment, coatings are deposited on HSS a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3zx44k |