Study on thermoelectric property and simulation of ZnO/Silicon-Rich oxide Multilayers

碩士 === 國立成功大學 === 電機工程學系 === 105 === In our research, zinc oxide (ZnO) / silicon oxide (silicon oxide) (SRO) multilayers were anylized by simulation and expertiment. We optimize the film thickness and use the silicon-rich oxide layer as phonon scattering to reduce the thermal conductivity.Therefore,...

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Bibliographic Details
Main Authors: You-CyunSu, 蘇祐群
Other Authors: Chuan-Feng Shih
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/3h3w7f