Study on thermoelectric property and simulation of ZnO/Silicon-Rich oxide Multilayers
碩士 === 國立成功大學 === 電機工程學系 === 105 === In our research, zinc oxide (ZnO) / silicon oxide (silicon oxide) (SRO) multilayers were anylized by simulation and expertiment. We optimize the film thickness and use the silicon-rich oxide layer as phonon scattering to reduce the thermal conductivity.Therefore,...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/3h3w7f |