45nm High-k / Metal Gate process pilot-run procedure improvement

碩士 === 國立成功大學 === 電機工程學系碩士在職專班 === 105

Bibliographic Details
Main Authors: Chou-ChiehChen, 陳周傑
Other Authors: Hong-Tzer Yang
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/6q57x5