Investigations of RF Sputtered AlN Thin Films with Different Orientations and Its Applications on Resistive Random Access Memories

碩士 === 國立成功大學 === 電機工程學系 === 105 === In recent years, the memory technology of semiconductor industry has been well developed. Resistance random access memory (RRAM) has potential to replace FLASH memory position in the nonvolatile memory (NVM). Because conductive bridge random access memory (CBRAM)...

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Bibliographic Details
Main Authors: Huei-YuLiou, 劉惠瑜
Other Authors: Sheng-Yuan Chu
Format: Others
Language:en_US
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/x7v2nm