Investigation of Indium Titanium Zinc Oxide Thin Film Transistors Fabricated by RF Sputtering System and Their Optoelectronic Application
碩士 === 國立成功大學 === 電機工程學系 === 105 === In this thesis, indium titanium zinc oxide (InTiZnO) is deposited by RF magnetron sputtering and the film properties are discussed thoroughly under different processing ambiences. Next, we will use InTiZnO thin film for device fabrication, including photodetector...
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| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/y972cf |