Application of supercritical carbon dioxide electrodeposition for copper filling into nano-holes in heat-treated anodic aluminum oxide template
碩士 === 國立成功大學 === 材料科學及工程學系 === 105 === Copper metal filling into heat-treated anodized aluminum oxide (AAO) nano-array holes was attempted by electrodeposition involving emulsified supercritical carbon dioxide (sc-CO2) fluid, in comparison with that performed using conventional process at ambient p...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9f9arb |