Preparation of Al2O3 Thin Films by Atomic Layer Deposition Applied to Passivated Emitter and Rear Cell
博士 === 國立中興大學 === 電機工程學系所 === 105 === Compared to traditional monocrystalline silicon solar cells, passivated emitter and rear cells (PERC) feature as its rear-side passivation stacks of aluminum oxide and silicon nitride (Al2O3/SiNx), which can reduce the recombination velocity and enhance the abso...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38550395546487981695 |