Effect of the deposition Temperature on electric properties in InGaZnOx Thin Film by RF sputtering
碩士 === 國立中興大學 === 物理學系所 === 105 === In this experiment, we used radio frequency magnetron sputter to deposit the InGaZnO (IGZO) thin films with different deposition temperature. To analyze the films properties by X-ray diffraction (XRD) and ultraviolet-visible spectroscopy (UV / Vis). From XRD data,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41333186835056637800 |