Fabrication and Characterization of doped Ga2O3 and ZnO Thin-Film Transistors
碩士 === 國立中興大學 === 材料科學與工程學系所 === 105 === In this research, the β-Ga2O3 films were grown on c-plane sapphire substrates by metal-organic chemical vapor deposition and applied for the fabrication of thin-film transistors (TFTs). Through the Si-ion implantation and thermal annealing treatment, the film...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48551862117175137600 |