p-Type amorphous chromium carbon thin film alloys prepared by reactive sputtering system: effect of differentradio-frequency powers
碩士 === 國立中興大學 === 材料科學與工程學系所 === 105 === The effect of different radio-frequency (rf) powers on the characteristics of p-type amorphous chromium carbon (a-CrC) thin film alloys prepared by reactive sputtering system is investigated. Five kinds of a-CrC thin film alloys were deposited on n-type silic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50018173283048468230 |