Piezoresistance Model and Stress Analysis for 3D Transistor
碩士 === 國立中興大學 === 光電工程研究所 === 105 === The stress response of stressor to transistor in three-dimensional fin field-effect transistor is mainly researched in this paper. The research method is to draw the structure of fin field-effect transistor mainly by Ansys stress analysis emulator, emulate the s...
Main Authors: | Shao-Kai Chang, 張少愷 |
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Other Authors: | Shu-Tong Chang |
Format: | Others |
Language: | zh-TW |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/50990033092997548837 |
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