Piezoresistance Model and Stress Analysis for 3D Transistor

碩士 === 國立中興大學 === 光電工程研究所 === 105 === The stress response of stressor to transistor in three-dimensional fin field-effect transistor is mainly researched in this paper. The research method is to draw the structure of fin field-effect transistor mainly by Ansys stress analysis emulator, emulate the s...

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Bibliographic Details
Main Authors: Shao-Kai Chang, 張少愷
Other Authors: Shu-Tong Chang
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/50990033092997548837