Study of The Fabrication Optimization and Load-Deflection Relationship in Micro Cantilever Beams
碩士 === 明志科技大學 === 機械工程系機械與機電工程碩士班 === 105 === In this paper, microelectromechanical system process technology to body micro-processing processes such as: exposure, development, etching and other processes in the four-inch silicon wafer on the process optimization, the structural material for the sil...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65788700576692724615 |