Properties of TiCrBN Thin Films Grown by a Hybrid Superimposed High Power Impulse Magnetron Sputtering, Radio Frequency Sputtering and DCMS Sputtering Technique
碩士 === 明志科技大學 === 材料工程系碩士班 === 105
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43716892671955626157 |