Structure and Properties of the CrAlSiN Hard Films by Physical Vapor Deposition
碩士 === 龍華科技大學 === 機械工程系碩士班 === 105 === Solid ceramic thin films that are made of transition metal nitrides, such as ZrWN, CrWN, TiAlN and TiN, are used on cutting and forming tools, in various industrial applications where there is an abrasive wear environment, and as a diffusion barrier and protect...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/qwx8s7 |