Aqueous lateral exitaxial overgrowth of ZnO layers on honeycomb patterned buffer layers through a Continuous Flow Reactor
碩士 === 義守大學 === 材料科學與工程學系 === 105 === In this study, the growth of high quality zinc oxide (ZnO) epitaxial layer is the major objective. To further reduce dislocation density, lateral epitaxial overgrowth (LEO) integrating with patterning processing had been proposed. In previous study, maskless LEO...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/kx6rhd |