Effects of annealing temperatures on microstructural and nanomechanical properties of Cu-doped In2O3 thin films
碩士 === 義守大學 === 材料科學與工程學系 === 105 === In this study, the microstructural and nanomechanical properties of Cu-doped In2O3 thin films with various annealing temperatures of 700-900 ° C are investigated by using XRD, SEM and nanoindentation techniques. The Cu-doped In2O3 thin films are deposited on Co...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43ky48 |