Study on Measurement of Surface Profile with Cylindrical Vector Interferometry

碩士 === 逢甲大學 === 電機工程學系 === 105 === This thesis proposes a novel cylindrical vector interferometry for measuring the surface profile. This method is based on cylindrical vector beams, Twyman-Green interferometry, and dual-wavelength technology. In the experimental apparatus, the linearly polarized be...

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Bibliographic Details
Main Authors:	BI, WEI-EN, 畢維恩
Other Authors:	CHEN, KUN-HUANG
Format:	Others
Language:	zh-TW
Published:	2017
Online Access:	http://ndltd.ncl.edu.tw/handle/31149972591579915693

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