Study on Measurement of Surface Profile with Cylindrical Vector Interferometry
碩士 === 逢甲大學 === 電機工程學系 === 105 === This thesis proposes a novel cylindrical vector interferometry for measuring the surface profile. This method is based on cylindrical vector beams, Twyman-Green interferometry, and dual-wavelength technology. In the experimental apparatus, the linearly polarized be...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31149972591579915693 |