| Summary: | 碩士 === 逢甲大學 === 電機工程學系 === 105 === This thesis proposes a novel cylindrical vector interferometry for measuring the surface profile. This method is based on cylindrical vector beams, Twyman-Green interferometry, and dual-wavelength technology. In the experimental apparatus, the linearly polarized beam passes through a cylindrical vector generating element to generate cylindrical vector polarization beams. Then the beams pass through the Twyman-Green interferometer, where one of arm put a tested specimen, to form interference fringes. When the wavelength has small change, a CMOS camera can capture two interferometric patterns. Analyzing the intensities of these interferometric patterns, the phase difference distribution can be accurately obtained. Substituting the phase difference distribution into the specially derived equation, the surface profile can be reconstructed. To validate the proposed method, the standard gauge block and convex mirror were measured experimentally, and the measurement resolution was approximately 61.42 µm. Because of the method requiring only two interferometric patterns to reconstruct the surface profile, it is characterized by the advantages of fast measurement and lower error. In addition, due to the introduction of dual-wavelength technology, the measured range of sample can be increased to centimeter. This method also has the merits of high sensitivity, non-destructive, full-field measurement, and simple structure.
|
|---|
