Measurement and Simulation Analysis of Residual Stress in Optical Multilayer Thin Films
碩士 === 逢甲大學 === 電機工程學系 === 105 === This study was focused on the residual stress in single-layer and multilayer thin films, the residual stress in single and multilayer thin films was measured by a Twyman-Green interferometer combined with fast Fourier transform(FFT) method. A simulation program for...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38257320513484209652 |