Design and Fabrication of a Cantilever-based Microparticle Filter

• Main Authors: TANG, KEN-WEI, 湯根瑋
• Other Authors: TSOU, CHING-FU
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/bbvt57

碩士 === 逢甲大學 === 自動控制工程學系 === 105 === In this study, we propose a chip with microparticle sized filter and measurement, which miniaturizes the screening and measurement structure through microelectromechanical system technology. Its design principle and measurement structure are mainly based on KOH wet etching solution on double-sided polishing silicon substrate with length 100μm, width 10 and 20 μm cantilever beam and a backside etched through silicon via were etched, and the number of cantilever beams was 20, 60 and 100 pairs, respectively. Then, used the thermal evaporator deposited the aluminum metal on the silicon substrate to produce the electrode for impedance measurement. This chip can filter at the same time, but also the amount of microbeads measured. The measurement structure is mainly to contain the micro-beads of buffer into the chip and through the cantilever structure will be different sizes of micro-beads filtered out, after filtration only to leave the big size of the beads on the cantilever beam, then, used the LCR meters measured impedance value。Through the impedance value, we can kown the number of beads. It is expected that the number of cancer cells can be applied in different sizes in the future.