Design and Fabrication of a Cantilever-based Microparticle Filter
碩士 === 逢甲大學 === 自動控制工程學系 === 105 === In this study, we propose a chip with microparticle sized filter and measurement, which miniaturizes the screening and measurement structure through microelectromechanical system technology. Its design principle and measurement structure are mainly based on KOH w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/bbvt57 |