Study on The Carbon Dioxide Emission Conversion Factors (CECFs) and Total Equivalent Carbon Dioxide Emission (TECE) of the 8” Wafer FABs
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 104 === SEMI ECF S23-0813 [1] provided in the ECFs and TEE to analyze electricity distribution only for semiconductor plants, but in fact many facility system or fabrication process not only the use of electricity, such as hot water system will burn gas and powe...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
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Online Access: | http://ndltd.ncl.edu.tw/handle/49eht6 |