Design and Analysis of Airtight Valve Door of Sputtering Machine
碩士 === 國立臺北科技大學 === 機電整合研究所 === 104 === This research designed the airtight valve door for sputtering machine in order to achieve high vacuum in sputtering cavity. This research designed a toggle position of four-bar linkage, which generated infinite mechanical advantage called toggle effect. The to...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/b4v4ks |