Design and Analysis of Airtight Valve Door of Sputtering Machine

碩士 === 國立臺北科技大學 === 機電整合研究所 === 104 === This research designed the airtight valve door for sputtering machine in order to achieve high vacuum in sputtering cavity. This research designed a toggle position of four-bar linkage, which generated infinite mechanical advantage called toggle effect. The to...

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Bibliographic Details
Main Authors: Liang-Yen Chien, 簡良諺
Other Authors: Jenq-Huey Shyu
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/b4v4ks