The study of Ga2O3 Thin Film and Distributed Bragg Reflection Structure by RF Magnetron Sputter System
碩士 === 南臺科技大學 === 光電工程系 === 104 === In this study, Ga2O3(Gallium Oxide) thin film were prepared on sapphire substrates by RF magnetron Sputter system. and we observed the Ga2O3 thin film layers characteristics of emission by Photoluminescence measurement. At first, Ga2O3 thin film grow on sapphire s...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8r97nx |