Taguchi Method is Applied Slit Coating Process of Optimizing
碩士 === 聖約翰科技大學 === 機械與電腦輔助工程系碩士班 === 104 === This study on slit coating technology of photo resist coating to the glass substrate test and discuss this article by changing the speed of coating, for speed, coated high speed research and analysis. This research is expected to respectively for coated...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/a2f2ha |