Development of Frequency Difference Moiré Method for Wafer Surface Profile Measurement
碩士 === 國立臺灣科技大學 === 機械工程系 === 104 === A novel technique for surface profile measurement by the frequency difference moiré method for measuring sapphire wafers on top of a high speed rotating platform (1500rpm) is proposed in this study. This measurement technique is based on the moiré method, combin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8sewep |