Development of leaf-spring type micro-positioning stage
碩士 === 國立臺灣科技大學 === 機械工程系 === 104 === In this study, a micro positioning stage designed using leaf spring structure for displacement measurement is developed. By adjusting the placement and position of the leaf spring of the structure, micro positioning stage for different positioning capability can...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tg75xg |